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Inficon gauge controller. Vacuum Gauge Controller .


Inficon gauge controller IE414 is a Bayard-Alpert gauge while the IE514 is based on the extractor principle. The TripleGauge® BCG552 combines 3 vacuum sensing elements in one sensor flange. Inficon TPG361 Operating Manual (94 pages) Single-Channel & Two-Channel Control Units for Compact Gauges. The proven temperature controlled, corrosion resistant, ultra-pure ceramic sensor provides superior span stability over many years paired with state-of-the-art zero stability. Ion Reference gauge Controller The INFICON Ion Reference gauge Controller IRC081 and its User Interface are an operating and display interface to the standardized Ion Reference Gauge IRG080. The INFICON Pirani Gauge Enhanced 300 (PGE300) like it's bigger brother PGE500 is equipped with the latest digital convection enhanced Pirani technology available on the market. This flagship of the new Trigon TM family offers a extremely wide measurement range from UHV (5 x10-10) up to ATM (1500 mbar). A new calibrated gauge controls a high quality standard over time to ensure a stable production process. Learn more Semiconductor IDM & Foundry Sensors tailored to support a wide range of applications, ensuring product safety, increased yield and maximum productivity INFICON Vacuum Gauges; Ion Multi Gauge Controller; Quality Crystals, Hardware and INFICON Rate Monitors and Controllers. MPG400 FPM sealed MPG401 metal-sealed Measurement Vacuum Gauge Controller . 7×10-11 hPa | mbar using the BAG and PGE gauges. The 235002 Leybold Center One Single-Channel Vacuum Gauge Controller may still be available for purchase and support from Artisan Technology Group beyond End-Of-Life (EOL) by the manufacturer (OEM). 4 Digit display for easy read out; The Inverted Magnetron Vacuum Gauge MAG470 is for all ultra high vacuum applications. All inspection documents are in compliance with the European Standard EN 10204. Advanced digital electronics improve gauge performance and offer easy handling features such as one pushbutton zero function. CDG100D gauges are temperature controlled at 100 °C for superior performance in demanding semiconductor and plasma processes. INFICON offers customer specific adjustment of pressure switch. inficon. This gauge combines decades of experience with state-of-the-art technology to set an unsurpassed standard in the industry. MKS / Granville-Phillips® VGC083A 355 Micro-Ion® Safety . 3×10-4 1333 1×10-4 1000 1. Brand: Inficon Inficon Gemini MPG500 Inverted Magnetron Cold Cathode/Pirani Combination Gauge, UHV, CF 2. VGC031 controller pdf manual download. com Operating Manual Plug-In Boards for Total Pressure Gauge Controller TPG300 IG9972BEN INFICON AG, LI–9496 Balzers, Liechtenstein www. The gauge heads MAG050, MAG060 and MAG070 are long-established passive, inverted magnetron cold cathode gauges intended to operate with the Vacuum Gauge Controllers VGC094 and VGC083C. VGC083A, VGC083B . They are available for Vacuum Gauge Controller . Brand: Inficon | Category: Measuring Instruments | Size: 1. The Ion Reference gauge Controller IRC081 and its user interface are an operating and display interface to the standardized Ion Reference Gauge IRG080. Inficon offes same connectors/ pin assignment, analog output and RS232/485 compatibility. General vacuum measurement and control form low to the high vacuum range; Specifications. com Operating Manual Pirani Gauge TPR018 VGC50x Vacuum Gauge Controller Sustainable solution for process measurement, control and data log Compatible to the wide range of INFICON active gauges, the new VGC50x series of active gauge controllers are able to monitor and data ORJ WKH HQWLUH SUHVVXUH UDQJH IURP Ü{ Ô WR PEDU Ü{ Ô to 1125 Torr) and the set point status. Equipped with the same sensor technology, the PEG050 works in conjunction with our The VGC502 is your complete solution for process pressure measurement and control. The BCG450 is designed to take the place of three sensors (hot ion, convection The gauge heads PSG010, PSG017 and PSG018 are long-established passive Pirani gauges intended to operate with the Vacuum Gauge Controller VGC094. IRC081 delivers, in combination with IRG080, precise and reference total pressure measurement in the range of 10-8 mbar (10-6 Pa) to 10-4 mbar (10-2 Pa). General vacuum measurement and control in the medium and high vacuum range; Specifications. Thanks to its convection enhanced principle, PGE050 is capable of high accuracy readings in the measurement range between 1. These passive gauges are combined and controlled by the IM540 vacuum gauge controller. Compatible with all INFICON active pressure gauges, the VGC501 controller can monitor the entire pressure range from 10-10 to 1500 mbar (10-10 to 1125 Torr) and the setpoint status. Combining technologies reduces the complexity of installation, setup, and The proven INFICON temperature controlled, corrosion resistant ultrapure ceramic sensor is the heart of the Cube`s outstanding performance. INFICON Edge Capacitance Diaphragm Gauge is a highly accurate vacuum measurement instrument designed for harsh manufacturing environments. Vacuum Gauge Controller The Vacuum Gauge Controller VGC031 is a single channel gauge controller for the INFICON Pirani Gauge Enhanced PGE050. The rugged sensor design combined with the compact size and the variety of Bayard-Alpert Pirani Capacitance Diaphragm Gauge (TripleGauge ®), BCG450, combines the advantages of three different technologies in a single, compact, economical package to measure process and base pressure from 5×10-10 to 1500 mbar (3. The Vacuum Gauge Controller VGC083 A/B/C is a three channel gauge controller for vacuum pressure monitoring and controlling from atmosphere down to ultra-high vacuum. The miniature sensor offers a The INFICON Pirani Standard Gauges, PSG500, PSG502-S, PSG510-S and PSG512-S, employ the most advanced digital Pirani technology available in themarketplace. PGE050 Convection enhanced Pirani technology for wide measurement range and higher accuracy near atmosphere The INFICON Pirani Gauge Enhanced (PGE) DeviceNet version is equipped with the latest digital convection enhanced Pirani technology available on the market. The vacuum gauges must be operated in accordance with their respective operating manuals. PN: 3MB0-008-000P. VGC031 and PGE050 are a The NEW INFICON Vacuum Gauge Controller VGC083 is designed for use with passive gauge heads BAG05x and PGE050 in a fixed combination of two PGE050 gauges and one BAG05x gauge. INFICON Stripe using an innovative heating concept, which provides a cool to the touch surface, and its unique speed capabilities,enabling an unprecedented productivity increase, making it the most advanced vacuum instrument Vacuum Gauge Controller The Vacuum Gauge Controller VGC094 is a prestigious solution for vacuum process measurement, control and data log. Six (6) single-pole relays The INFICON Three Channel Gauge Controller family VGC083A/B/C is designed to control and monitor vacuum pressure from atmosphere down to ultrahigh vacuum with a unique choice of different passive gauge head types, reaching from Convection Enhanced Piranis to different Bayard-Alpert Hot INFICON ModeLock technology provides the longest crystal life and ensures the most stable, highest resolution rate and thickness measurement available, even at very low rates; Maximize yield with the best QCM thickness measurement possible; Single channel rate and thickness monitor without unnecessary added features to compact size and minimize Available in single-layer and multiple-layer models; Patented ModeLock technology prevents film thickness errors caused by mode-hopping; Supports INFICON Crystal 12 ®, Crystal Six ®, and dual sensor automatic crystal switching for maximum productivity; XTC/3M multiple-layer model supports up to 99 processes, 999 layers, 32 films, 2 sensors, and two sources The controlling Pirani gauge and the controlled cold cathode gauge must both be connected to the same vacuum chamber to guarantee efficient operation. Compatible with all INFICON active pressure gauges, the VGC502 controller can monitor the entire pressure range from 10-10 to 1500 mbar (10-10 to 1125 Torr) and the setpoint status. 102 8 6 4 2 101 8 6 4 2 100 8 6 4 2 10–1 8 4 2 10–2 8 6 4 2 10–3 p (mbar) eff (mbar) 10 The VGC503 is your complete solution for process pressure measurement and control. 4 %âãÏÓ 77 0 obj > endobj xref 77 20 0000000016 00000 n 0000000974 00000 n 0000001173 00000 n 0000001207 00000 n 0000001228 00000 n 0000001606 00000 n 0000001743 00000 n 0000001883 00000 n 0000002391 00000 n 0000002990 00000 n 0000004637 00000 n 0000005548 00000 n 0000009810 00000 n 0000010012 00000 n INFICON temperature compensated Edge CDG025D2 with EtherCAT Capacitance Diaphragm Gauge is a highly accurate vacuum measurement instrument designed for harsh manufacturing environments. Inficon / Leybold: Model: 235002: Condition: Used and in Excellent Condition: Product Family: We have 1 Inficon IF300P Vacuum Gauge Controller manual available for free PDF download: Operating Manual . Đây là giải pháp lý tưởng cho quy trình đo lường, điều khiển và ghi dữ liệu trong các hệ thống chân không. The PGE series provides a bright and easy to read OLED display, one or two PASSIVE GAUGE / CONTROLLER SET UP VGC031 PGE050 INFICON PGE050 / PGE300 / PGE500 Vacuum enclosure Sensor wire / filament (gold plated tungsten or platinum) The INFICON Vacuum Gauge Controller VGC083 is designed for use with passive gauge heads BAG05x or MAG0x0 and PGE050 in a fixed combination of two PGE050 gauges and one BAG05x or MAG0x0 gauge. Vacuum Gauges & Controllers Vacuum Components Markets Analytical Instrumentation INFICON supports leading-edge technology and enables the highest quality Display products. The compact All-In-One Hot Ion gauge BAG302 offers an easy to exchange Working at INFICON Products MAG084 is a unique magnetic field resistant inverted magnetron cold cathode gauge designed to operate with the Vacuum Gauge Controller VGC094. Based on an innovative concept of ionization vacuum gauge (the hot cathode emits electrons travelling on a straight path into a Faraday cup), IRG080 is suitable as reference standard in the range of 10-8 mbar to 10-4 mbar. Dòng này bao gồm các model VGC501, VGC502, VGC503. Cost effective pressure monitoring solution. In addition to its function as a calibration standard, the IRG080 has great potential for quality assurance in semiconductor technology, particle synthesis and coating technology, aerospace Vacuum Gauge Controller . The switches are available in two versions, absolute (references Vacuum Gauges & Controllers Vacuum Components Markets Analytical Instrumentation Battery Display Energy HVAC/R The INFICON Vacuum Switch VSA100A is used as a safety switch in vacuum systems. They are available for full scale ranges from 100 mTorr to 1000 Torr, with all common flange types and fieldbus Vacuum Gauge Controller The Vacuum Gauge Controller IM540 is a versatile ionization gauge controller offering complete vacuum measurement and control in the range between 10-12 mbar and atmospheric pressure. The VGC031 vacuum gauge controller is a convenient and inex-pensive power supply and readout instrument for the INFICON PGE050 Pirani Gauge Enhanced or a Granville-Phillips® 275 Convectron®. Spot™ CDS500D. With its added ATM sensor, BCG552 is well-suited for differential pressure measurement and for use as vacuum switch in several applications. It is used together with va cuum gauges of the PSG, PCG, PEG, MPG, CDG, BPG, BCG and HPG series and is used for total pressure measurements. Compatible to the wide range of INFICON passive gauges, VGC094 is able to monitor the entire vacuum pressure range from 1×10-11 to 1000 mbar. No patent liability is assumed by INFICON with respect to use of information cir- cuits, equipment, As multifunctional controllers for process measurement, control and data logging, the TPG361 and TPG362 active pressure gauge controllers are designed to work seamlessly with a wide range of active compact pressure gauges. At its core, the Cold Cathode utilizes Cold Cathode Ionization Gauge technology, a method pioneered by INFICON that relies on the measurement of ionized gas particles to determine pressure levels within a vacuum system. CDG045D gauges are temperature controlled at 45 °C for superior signal stability and repeatability. The VGC031 is Inficon VGC502 Double Channel Vacuum Pressure Gauge Controller, PN 398-482. The VGC031 is The INFICON Pirani Capacitance Diaphragm Gauge (PCG55x) combines the INFICON Pirani technology with the advantages of a ceramic capacitance diaphragm sensor in a single product. If different controller units are used, the The INFICON Ion Reference gauge Controller IRC081 is an off-the-self solution for users seeking a commercial device and is available in the INFICON catalog. VGC031 acts as a convenient power supply, control and readout, allowing straightforward vacuum pressure monitoring and controlling from atmosphere down to high vacuum (1. VGC094 can be user-configured to control up to 4 passive gauge heads (Pirani gauges, inverted magnetron INFICON VGC50x Vacuum Gauge Controller. The INFICON Bayard-Alpert Pirani Combination Gauge, BPG400, functions as two gauges in a single compact unit measuring from 5×10-10 mbar to atmosphere (3. Compatible with all INFICON active pressure gauges, the VGC503 controller can monitor the entire pressure range from 10-10 to 1500 mbar (10-10 to 1125 Torr) and the setpoint status. Inficon IF300P Operating Manual (22 pages) Plug-In Boards for Total Pressure Gauge Controller. In all communications with INFICON, please specify the information on the product nameplate: • The VGC083C Vacuum Gauge Controller • One INFICON MAG050 or Stripe comes with the INFICON patented unique sensor shield which protects the gauge from undesired process by-products. LabVIEW instrument driver for Inficon VGC series vacuum gauge controllers - plasmapper/inficon-vgc-labview The VGC031 vacuum gauge controller is a convenient and inex-pensive power supply and readout instrument for the INFICON PGE050 Pirani Gauge Enhanced or a Granville-Phillips® 275 Convectron®. Equipped with the same sensor components as the The gauge head MAG084 is a unique magnetic field resistant inverted magnetron cold cathode gauge designed to operate with the Vacuum Gauge Controller VGC094. 7×10-2 mbar (3. Cube sets new standards in modern communication and user flexibility with a 20 Bit analog output and RS232-C, TCP / IP and HTML digital output connected through wireless or wired Ethernet interface. 75. The INFICON Bayard-Alpert Pirani Capacitance Diaphragm Gauge (TripleGauge ®), BCG450, combines the advantages of three different technologies in a single, compact, economical package to measure process and base pressure from 5×10-10 to 1500 mbar (3. Electrical connections of gauges, analog signals, relays contacts etc. VGC083B controller pdf manual download. In all communications with INFICON, please specify the information on the product nameplate. Although it is called Pirani Gauge Display the PGD500 also supports our PCG55x and MPG series vacuum gauges. They are designed for vacuum measurement of gases in the pressure range of 8×10-4 to 1000 mbar. 75×10-10 Torr to 5×10-2 Torr). Developed to sustain operation in strong external magnetic fields; Reliable and proven gauge head design, based on the inverted magnetron principle The INFICON Pirani Standard Gauge (PSG55x) employs like his brothers PCG55x and PSG50x the most advanced digital Pirani technology available. The INFICON Three Channel Gauge Controller family VGC083A/B/C is designed to control and monitor vacuum pressure from atmosphere down to ultrahigh vacuum with a unique choice of different passive gauge head types, reaching from Convection Enhanced Piranis to different Bayard-Alpert Hot. Sensor Heads, Feedthroughs, Sputter Heads, Cables, Oscillators and Parts InstruTech's VGC301A vacuum gauge controller is a convenient and inexpensive power supply and readout instrument for a CVG101 Worker Bee convection The Leybold IG 3 /CC3 Vacuum Gauge Controllers feature a primary sensor that measures pressures from 1 x 10-10 to 1 x 10-2 torr. The gauge is connected to the controller via a measurement cable (→ "Accessories"). BAG050 is an electron bombardment (EB) degas nude ionization vacuum gauge capable of UHV pressure measurement as low as 2×10-11 mbar. 2 tinb29e1-c (2019-10) VGC083A_B. The INFICON Porter CDG020D Capacitance Diaphragm Pressure Gauge, with its remarkable range stability and unmatched long-term performance, is the pinnacle of pressure measurement technology. Add to my manuals 399-581 and 399-583 are custom cable assem- blies provided in different lengths from INFICON for connecting the VGC031 controller to INFICON PGE050 Pirani Gauge En- ® hanced or MKS Instruments / Granville Vacuum Gauge Controller VGD500 Suitable for INFICONs CDG product family (SKY CDGxxxD & Edge CDGxxxD2) Drop-in Options Revolutionize your vacuum gauge experience with us! The INFICON Vacuum Gauge Display VGD500 connects to our CDG product line to provide a 4 Digit Display. The VGC031 is INFICON SKY CDG100D manometers are your best choice for accurate total pressure measurement and control. VacXplor™ Software. Working at INFICON Products Vacuum Gauges & Controllers Vacuum Components Markets Analytical Instrumentation Battery Display Energy HVAC/R Industrial Manufacturing INFICON SKY CDG200D high temperature manometers are your best choice for accurate total pressure measurement and control. The VGC402 and VGC403 Vacuum Gauge Controller is a display and control unit for vacuum gauges made by INFICON. Stripe comes with the INFICON patented unique sensor shield which protects the gauge from undesired process by-products. The VGC031 is INFICON proudly presents the Trigon™ gauge series, the BAG Seamless Integration: VGC50x Controller Series Compatibility: Trigon™ seamlessly collaborates with INFICON's Vacuum Gauge Controller series, ensuring a fully Page 47 Literature www. Sign In Upload. This document applies to products with part number: Phillips® (GP) 355 passive Micro-Ion® vacuum gauge with the INFICON Vacuum Gauge Controller VGC083A. CDG200D gauges are temperature controlled at 200 °C for superior performance in demanding semiconductor and plasma processes. • The TPG300 control unit must be turned off before any work is performed on the gauge or • Wait at least 15 seconds after turning off, before connecting cable. With its wider measuring range and The INFICON single Bayard-Alpert Hot Ion gauge BAG302 covers a wide measurement range from 1. Compatible with all INFICON active pressure gauges, the VGC501 controller can Compatible to the wide range of INFICON active gauges, the new VGC50x series of active gauge controllers are able to monitor and data log the entire pressure The INFICON Vacuum Gauge Controller 031 (VGC031) is designed for use in conjunction with the INFICON Pirani Gauge Enhanced 050 (PGE050) and acts as a convenient power supply, control and readout. The VGC503 is your complete solution for process pressure measurement and control. 7×10-2 mbar (1 × 10-9 to 5 × 10-2 Torr). VGC083C controller pdf manual download. By use of the Ion Reference gauge Controller IRC081the conditions for operation compliant toEN 61010-1:2010 + A1:2019 + A1:2019/AC:2019 are fulfilled. Add to my manuals. VGD500. Top-of-the-line product for pressure measurement and control. VGC083C . For more information see our document “Calibration Service for Vacuum The INFICON Three Channel Gauge Controller family VGC083A/B/C is designed to control and monitor vacuum pressure from atmosphere down to ultrahigh vacuum with a unique choice of different passive gauge head types, reaching from Convection Enhanced Piranis to different Bayard-Alpert Hot INFICON Vacuum Switches are designed for accurate and reliable pressure detection. In all communications with INFICON, please specify the information on the product nameplate: • The VGC083C Vacuum Gauge Controller • One INFICON MAG050 or VGC50x Vacuum Gauge Controller Sustainable solution for process measurement, control and data log Compatible to the wide range of INFICON active gauges, the new VGC50x series of active gauge controllers are able to monitor and data ORJ WKH HQWLUH SUHVVXUH UDQJH IURP Ü{ Ô WR PEDU Ü{ Ô to 1125 Torr) and the set point status. The INFICON Porter ® CDG020D Capacitance Diaphragm Gauge is a high quality, cost effective, gas type independent absolute pressure sensor. 8 x 10-9 Torr to atmosphere). 8×10-10 Torr to atmosphere). 3 × 10-9 to 6. It`s a small unit which Displays the pressure of the gauge. The INFICON Pirani Gauge Display PGD500 in combination with the INFICON Pirani Standard Gauge PSG5xx provides a cost effective pressure monitoring solution. Further information and details on installing/removing plug-in boards and handling of empty slots you find in [1]. The VGC031 is INFICON SKY CDG160D high temperature manometers are your best choice for accurate total pressure measurement and control. BPG552 consists of an Bayard-Alpert Hot Ionization sensor element and a classical, robust and Working at INFICON Products Vacuum Gauges & Controllers Vacuum Components All functions integrated – No controller required; Product details Capacitance Manometers. INFICON SKY's CDG025D: Top-tier Capacitance Diaphragm Gauge blending expertise & innovation. In all communications with INFICON, please specify the information on the product nameplate: • The VGC083C Vacuum Gauge Controller • One INFICON MAG050 or Vacuum GaugesCDG Selection Overview CDG Selection Overview Vacuum Gauges I | Vacuum Control Catalog 2018 – 2020 Vacuum Control Catalog 2018 – 2020 | II CDG020D PorterTM A1 CDG025D SKYTM A5 CDG025D-S CDG025D-X3 SKYTM A9 CDG025D-X3 SKYTM A13 CDG025D2 EdgeTM A17 CDG045D SKYTM A21 CDG045D2 EdgeTM A27 CDG045Dhs The INFICON SKY CDG025D Capacitance Diaphragm Gauge line of highly accurate temperature compensated manometers is designed for stable performance in harsh manufacturing tool environments. In the measurement range between 10 mbar and atmosphere the capacitance diaphragm technology provides gas-type independent, highly accurate values for reliable pressure Vacuum Gauge Controller . The gauge consists of two separate measuring systems (the Pirani and the cold cathode system according to the inverted magnetron principle). The VGC031 is The VGC031 vacuum gauge controller is a convenient and inex-pensive power supply and readout instrument for the INFICON PGE050 Pirani Gauge Enhanced or a Granville-Phillips® 275 Convectron®. In all communications with INFICON, please specify the information on the product • The VGC083A Vacuum Gauge Controller • One INFICON BAG050 nude UHV EB-degas Bayard-Alpert hot cathode ionization gauge (IG) or other brands of nude UHV EB-degas B-A gauges Vacuum Measurement Gauges and Controllers. For applications that require a measurement range from UHV (5 x10-10) down to ATM (1000 mbar), the Trigon™ family includes the dual technology BPG552 gauge. Brand: Inficon The VGC031 vacuum gauge controller is a convenient and inex-pensive power supply and readout instrument for the INFICON PGE050 Pirani Gauge Enhanced or a Granville-Phillips® 275 Convectron®. 3×10-4 mbar). The 1/8-DIN housing can be used as a bench top, or mounted in a cutout in an instrument panel. The BAG552 can also be operated in conjunction with the INFICON Vacuum Gauge Controller series VGC501, VGC502, VGC503. VGC094 can be user-configured to control up to 4 The INFICON single Bayard-Alpert Hot Ion Gauge BAG402 covers a wide measurement range from 5×10-10 mbar to 2. Page 28: Ion Gauge CG2/ALT display channel. When equipped with optional Pirani or capacitance diaphragm gauge modules, the IG 3 can measure up to VGC094 is a prestigious solution for vacuum process measurement, control and data log. Depending on the application and user’s needs, IM540 is the one-stop solution as it may combine up to 4 different principles Compatible to the wide range of INFICON active gauges, the new VGC50x series of active gauge controllers are able to monitor and data log the entire pressure range from 10⁻¹⁰ to 1500 mbar (10⁻¹⁰ to 1125 Torr) and the set point status. 42 MB Vacuum Gauges & Controllers Vacuum Components Markets Analytical Instrumentation Part of the next generation of INFICON Zevision deposition controllers which offer new patented technology needed for today’s optical coaters. The compact metal design provides a robust solution Provides exceptional value by combining the proven performance of INFICON thin film controllers with unique features, all designed for you to achieve the most from your OLED process Cygnus® 2 INFICON ModeLock technology ensures the most stable, highest resolution rate and thickness measurement available, even at very low rates Working at INFICON Products Equipped with the same sensor technology, the PGE050 works in conjunction with our VGC031 and VGC083 passive gauge controller units. Download Table of Contents. depend on Vacuum Gauge Controller . INFICON convection enhanced Pirani gauges series PGE is available in two active and one passive gauge set up. VGC094 can be user-configured to control up to 4 Vacuum Gauge Controller . They are available for full scale ranges from 1 Torr to 1000 Torr, with all common flange types Vacuum Gauges & Controllers Vacuum Components Markets Analytical Instrumentation Battery Display INFICON supports leading-edge technology and enables the highest quality Display products. 1 mbar. Over the whole measuring range, the measuring signal is output as a logarithm of the pressure. VGC083 can be configured to control and read-out up to 3 passive gauge heads among two types of passive sensors design types: one ionization We have 1 Inficon TPG361 Vacuum Gauge Controller manual available for free PDF download: Operating Manual . The BPG400 gauges have been designed for vacuum measurement of non-flam-mable gases and gas mixtures in a pressure range of 5×10-10 1000 mbar. VacXplor, our modular user software is designed to enhance your experience The Inficon VGC40x Series Vacuum Gauge Controllers are able to monitor the entire pressure range from 10-10 to 1500 mbar (10-10 to 1125 Torr) and the set point status. 5 to 2000 mbar. Vacuum Gauge Controller The Vacuum Gauge Controller VGC083 is a three channel gauge controller for vacuum pressure monitoring and controlling from atmosphere down to ultra-high vacuum (2×10-11 mbar). The VGC083 controlls and monitors vacuum pressure from ATM down to 2. . 3×10-2 133'000 : Accuracy The Ion Reference Gauge IRG080 is a first-of-a-kind vacuum sensor developed for precise total pressure measurement in vacuum systems. The hot cathode ionization passive vacuum gauge heads BAG05x are nude (BAG050, BAG051) or glass tube (BAG052, BAG053) Bayard-Alpert sensors designed for use with the Vacuum Gauge Controller VGC083A/B. Share. The VGC083 controlls and The Inficon IG 3 /CC3 Vacuum Gauge Controllers feature a primary sensor that measures pressures from 1 x 10-10 to 1 x 10-2 torr. Also for: Vgc083a. MAG084. For example, to automatically interrupt the gas supply when venting vacuum systems with a purge gas at a pressure of 6 mbar below atmospheric pressure. Vacuum Gauge Controller . Inficon VGC502 Double Channel Vacuum Pressure Gauge Controller, PN 398-482. Due to the physical properties of convection this type of Pirani offers higher accuracy in the measurement range between 100 to The INFICON PBR 260 is a combination gauge that operates as two gauges in one single and compact unit. CDG160D gauges are temperature controlled at 160 °C for superior performance in demanding semiconductor and plasma processes. While Gemini MPG50x combines two sensor systems in one small device to measure from atmosphere down to 1x10 – 9 mbar, the Gemini MAG50x is a pure cold cathode sensor System (without Pirani element) which covers the range from 1x10-2 mbar to The INFICON Bayard-Alpert Pirani Combination Gauge, BPG402-S, functions as two gauges in a single compact unit measuring from 5×10-10 mbar to atmosphere (3. ADVANTAGES Vacuum Gauge Controller The Vacuum Gauge Controller VGC094 is a prestigious solution for vacuum process measurement, control and data log. EU Declaration of Conformity Vacuum Gauge Controller VGC083A, VGC083B tinb29e1-c (2019-10) ; Page 2: Product Identification INFICON cannot assume responsibility or liability for any actual use based on the examples and diagrams. 2 tinb42e1-a (2019-10) VGC083C. 75×10-10 to 1125 Torr) The INFICON High Pressure Hot Ionization Pirani Gauge, HPG400, combines High Pressure Hot Ionization and Pirani sensors in a single, compact, economical package to measure pressure from 2×10-6 mbar to atmosphere (1. The industrial design of VGC083 in combination with a large selection of available passive gauge heads provides a flexible yet reliable and economical choice for vacuum The INFICON Pirani Gauge Enhanced 500 (PGE500) is equipped with the latest digital convection enhanced Pirani technology available on the market. The Ion Reference gauge Controller IRC081 and its user interface are an The VGC501 is your complete solution for process pressure measurement and control. Download Table of Contents Contents. Product Identification Validity Intended Use Vacuum Gauge Controller The Vacuum Gauge Controller VGC094 is a prestigious solution for vacuum process measurement, control and data log. ADVANTAGES The VGC031 vacuum gauge controller is a convenient and inex-pensive power supply and readout instrument for the INFICON PGE050 Pirani Gauge Enhanced or a Granville-Phillips® 275 Convectron®. The Pirani Gauge Enhanced 050 (PGE050) is the passive version of our active convection enhanced Pirani gauges PGE300 and PGE500. They are designed for vacuum measurement in the pressure range from 1×10-11 (MAG070) to 5×10-3 mbar. Compatible to the wide range of INFICON passive gauges, VGC094 is able to monitor the entire vacuum pressure range from 1 × 10-11 to 1000 mbar. The rugged stainless steel sensor cell and compact design qualifythem for use on semiconductor systems and for standard applications, such as fore vacuum lines. Spot™ CDS500D Miniature sensor for OEM. VGC083 can be configured to control and read-out up to 3 passive gauge heads among two types of passive sensors design types: one ionization INFICON Edge Capacitance Diaphragm Gauge is a highly accurate vacuum measurement instrument designed for harsh manufacturing environments. The proven temperature controlled, corrosion resistant, ultra-pure ceramic sensor The INFICON Three Channel Gauge Controller family VGC083A/B/C is designed to control and monitor vacuum pressure from atmosphere down to ultrahigh vacuum with a unique choice of different passive gauge head types, reaching from Convection Enhanced Piranis to different Bayard-Alpert Hot INFICON offers internal factory calibration services for vacuum gauges / controllers. The VGC031 is INFICON Vacuum Switches are designed for accurate and reliable pressure detection. In all communications with INFICON, please specify the information on the product nameplate: • The VGC083C Vacuum Gauge Controller • One INFICON MAG050 or Vacuum Gauge Controllers Sustainable solution for process measurement, control and data log Compatible to the wide range of INFICON active gauges, the VGC50x series of active gauge controllers are able to monitor and data log the entire pressure range from 10-10 to 1500 mbar (10-10 to 1125 Torr) and the set point status. INFICON offers a comprehensive range of vacuum gauges and controllers designed for precise measurement and monitoring of vacuum levels in industrial processes. This innovative approach provides real-time feedback, allowing operators to monitor and control vacuum processes with precision. The INFICON Inverted Magnetron Pirani Gauges, MPG400 and MPG401, measure from 5 x 10-9 mbar to atmosphere (3. In all communications with INFICON, please specify the information on the product nameplate: • The VGC083C Vacuum Gauge Controller • One INFICON MAG050 or INFICON SKY CDG045D manometers are your best choice for high accurate total pressure measurement and control. 5×10-6 Torr to atmosphere). Connect to INFICON CDG product line to provide a 4 Digit Display. 75×10-10 to 1125 Torr). INFICON Stripe using an innovative heating concept, which provides a cool to the touch surface, and its unique Vacuum Gauge Controller. When equipped with optional Pirani or capacitance diaphragm gauge modules, the IG 3 can measure up to atmospheric pressure. These robust electronic switches are used in all vacuum applications, including pressure interlock. They are available for full scale ranges from 1 Torr to 1000 Torr, with all common flange types The VGC501 is your complete solution for process pressure measurement and control. The gauges can be operated in connection with the INFICON Vacuum Gauge Controller VGC103 or VGC40x or with other control devices. VGC094 can be user-configured to control up to 4 The gauges can be used with an INFICON Controller of the VGC40x / VGC50x series or with another evaluation unit. The mechanical design allows a short therm overload of 3000 mbar without any impairing the switching accuracy of ± 0. They efficiently manage and log data across a comprehensive pressure range from 10-10 to 1500 mbar (10-10 to 1125 Torr). The switches are available in two versions, absolute (references Vacuum Gauge Controller. Inficon CDG100D Manual (66 pages) EtherCAT for Capacitance Diaphragm Gauges. om. Learn more The INFICON Pirani Gauge Enhanced 050 (PGE050) is the passive version of our active convection enhanced Pirani gauges PGE300 and PGE500. We have 2 Inficon CDG100D Vacuum Gauge Controller manuals available for free PDF download: Manual . The proven Vacuum Gauges & Controllers Vacuum Components Markets Last but not least the new INFICON PPG570 can be used to direct drop in replace the so called MKS Instruments MKS901P “MicroPirani™ and Piezo Loadlock Vacuum The INFICON Vacuum Switch VSC150 is a absolute pressure switch with a adjustable electrical switching contact from 0. Choose the INFICON BAG402 for affordable and repeatable process to base pressure measurements in a compact active gauge package. In all communications with INFICON, please specify the information on the product nameplate: • The VGC083C Vacuum Gauge Controller • One INFICON MAG050 or The INFICON Three Channel Gauge Controller family VGC083A/B/C is designed to control and monitor vacuum pressure from atmosphere down to ultrahigh vacuum with a unique choice of different passive gauge head types, reaching from Convection Enhanced Piranis to different Bayard-Alpert Hot Inficon: Instrument Model: PG3: Description: Vacuum Gauge Controller: Instrument Type(s): Controller: Application Area(s): LifeScienceResearch,Automation: Drivers Available For This Instrument Model ADE Driver Type Interface(s) Options NI Certified Rating: LabVIEW: Product description: VGC094 is a prestigious solution for vacuum process measurement, control and data log. Thanks to the modulation of the cathode emission current, the IE414 measurement range spans over 9 decades from 10 -2 mbar down to 10 -11 mbar. • Select ITI NON-LINEA if you are using INFICON's convection gauge modules such as the PGE300 or PGE500 with a non-linear analog output. 3×10-4 to 1333 mbar. Combining technologies reduces the complexity of installation, setup, and Last but not least the new INFICON PPG550 can be used to direct drop in replace the so called MKS910 “DualTrans™ MicroPirani™ - Absolute Piezo Vacuum Pressure Transducers” as well as MKS925 “Micro Pirani™ Vacuum Pressure Transducers”. Zevision® IMC300. %PDF-1. The measurement range is from 5x10-11 mbar to 1x10-2 mbar. The HPG400 provides highly repeatable and reproducible pressure measurement for accurate sputter process pressure Page 1 Operating Manual Incl. Its special design, fitting a double ionization chamber principle, allows vacuum measurement in the pressure range from 1×10 -8 to 5×10 -3 mbar even in presence of strong external The hot cathode ionization passive vacuum gauge head BAG055 is a miniature, metal enclosed Bayard-Alpert sensor designed for use with the Vacuum Gauge Controller VGC083A. VGC50x hay còn gọi là Bộ điều khiển cho đầu đo chân không. Ionization Gauge Tubes; Thermocouple Gauges, Digital Controllers; InstruTech Convection and Hot Cathode Ionization Gauges and Controllers; Nude Ionization Gauge Tubes, Vacuum Gauge Controllers Sustainable solution for process measurement, control and data log Compatible to the wide range of INFICON active gauges, the TPG36x active gauge controllers are able to monitor and data log the entire pressure range from 10-10 to 1500 mbar (10-10 to 1125 Torr) and the set point status. The VGC502 is your complete solution for process pressure measurement and control. Delete from my manuals. Measurement range N 2: mbar Torr Pa: 1. The leading measuring principle is a hot cathode gauge according to the Bayard-Alpert principle, which will be completed and supported by The INFICON Gemini ® Inverted Magnetron Vacuum Gauge is the workhorse for all vacuum measurement applications. Inficon / Leybold: Model: CC3: Condition: Used and in Excellent Condition: Product Family: The VGC031 vacuum gauge controller is a convenient and inex-pensive power supply and readout instrument for the INFICON PGE050 Pirani Gauge Enhanced or a Granville-Phillips® 275 Convectron®. Intended Use The Pirani Standard Gauge PSG55x has been designed for vacuum measurement of gases in the pressure range of 5×10-5 to 1000 mbar. Vacuum Gauge Controller. The controlling Pirani gauge and the controlled cold cathode gauge must both be connected to the same vacuum chamber to guarantee efficient operation. BAG055 is an electron bombardment (EB) degas metal enclosed hot ionization vacuum gauge capable of pressure measurement down to 1×10-9 mbar. depend on The INFICON Three Channel Gauge Controller family VGC083A/B/C is designed to control and monitor vacuum pressure from atmosphere down to ultrahigh vacuum with a unique choice of different passive gauge head types, reaching from Convection Enhanced Piranis to different Bayard-Alpert Hot This Inficon Pirani Standard gauge also operates in connection with an INFICON Vacuum Gauge Controller VCG401, VCG402, VCG403. The compact metal design provides a robust solution suitable for general vacuum applications. $ 2,630 63 GAUGE" menu of the VGC083A Controller program . Our advanced Advanced controller for process measurement and data recording. Operating other than 20Manual : tinb48e1 (2018-10) Validity . The VGC40x Series is compatible to a wide range of Inficon View and Download Inficon VGC083B operating manual online. In applications where precision and reliability are critical, INFICON SKY introduces the CDG025D-X3 Capacitance Diaphragm Gauge, a top-of-the-line product for pressure measurement and control. ibialmf nqcqj zlqqa cyswoh gutdgr cflpjd axmtgl onglwv zlomy gtx